| Authors |
Mikhaylov Petr Grigor'evich, doctor of technical sciences, professor, leading researcher, Penza State Technological University (1а/11 Baydukova/Gagarina street, Penza, Russia), Е -mail: pit_mix@mail.ru
Chirkina Marina Aleksandrovna, candidate of technical sciences, associate professor, sub-department of Information and computer systems, Penza State University of Architecture and Construction (28 Herman Titov street, Penza, Russia), Е-mail: chm-77@mail.ru
Sazonova Vera Petrovna, collaborator, University of Technology (42 Gagarina street, Korolev, Moscow region, Russia), Е-mail: verochka.86@list.ru
Marinina Larisa Aleksandrovna, candidate of technical sciences, lecturer, Penza branch of Military Academy Logistics Support named after general of the army A. V. Khruleva (1 Voennyy gorodok, Penza, Russia), Е -mail: pit_mix@mail.ru
Bazarbay Lashyn, doctoral student, Kazakh National Technical University named after K. Satpayev (22 Satpaeva street, Almaty, Kazahstan), Е -mail: lashyn_7754@mail.ru
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| Abstract |
Background. Due to the growing demand for clean technologies for micro–and nanoelectronics, which can be carried out only in an atmosphere of hydrogen – a gas – reductant, means of control of its use are necessary to prevent leaks and explosions of hydrogen mixtures corresponding technologies for the manufacture of hydrogen sensors.
Materials and methods. It should be noted that the manufacturing processes of sensitive elements of hydrogen sensors (SEHS) are technologically very complex and time-consuming processes with insufficiently high yield of suitable devices, since they include several technological platforms: thin-film, solid-state and micromechanical. When carrying out technological operations (TO) on the formation of SEHS structures, complex, expensive equipment is used, including magnetron and electron beam spraying devices, reactors for the gas-phase deposition of polysilicon, silicon nitride and silicon dioxide, ion doping plants, diffusion furnaces.
Results. Special TO and TP for the formation of hydrogen-sensitive sensor elements were developed and tested in the manufacture of experimental samples.
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| Key words |
technology, operation, sensor, element, hydrogen deposition, alloying
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